Lau Effect Using LED Array for Lithography

Abstract Illumination with LEDs is of increasing interest in imaging and lithography. In particular, compared to lasers, are temporally spatially incoherent, so that speckle effects can be avoided by the application LEDs. Besides, LED arrays qualified due their high optical output power. However, have not been widely used for investigating effects, e.g., Lau effect. this paper, we propose an array realizing effect taking into account influence coherence properties illumination on Using incoherent or a single LED, triangular distributed fringes obtained. We apply obtained lithography produce analog structures. Compared using significantly higher intensities. Hence, exposure time process largely reduced.